Vacuum valve

ZM　series (Installation drawing)

• ZM038
• ZM056
• ZM079
• ZM113
• ZM154
• ZM201

NVV series(Installation drawing)

038

• NVV038S3
• NVV038ZM1
• SVV038C11
• NVV038SH3

056

• NVV056S3
• NVV056ZM1

079

• NVV079S3

113

• NVV113JT2
• NVV113JT3

154

• NVV154JT1

201

• NVV201NS1
• NVV201NS2

Chill vent

CVV-C series (With cooling)

• CVV60-C
• CVV80-C
• CVV100-C
• CVV120-C

CVV-D series (No cooling)

• CVV60-D
• CVV80-D
• CVV100-D
• CVV120-D

Vacuum device

General document (vacuum device)

• Input/output signal specification
• Survey of usage environment of vacuum device

DIEVS80-CVC2

• Specification
• Consumption

DIEVS120-CVC2

• Specification
• Consumption

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